《再生水利用 电子级水水源水质》团体标准解读

李声美; 王文龙; 吴乾元; 熊江磊; 田宇鸣; 巫寅虎; 陈卓; 蔡涵颖; 胡洪营

doi:10.13205/j.hjgc.202601001

《再生水利用电子级水水源水质》团体标准解读

doi: 10.13205/j.hjgc.202601001

1. 清华大学深圳国际研究生院环境与生态研究所深圳市生态修复与固碳重点实验室微生物应用与风险控制环境保护重点实验室, 广东深圳 518055;
2. 江苏中电创新环境科技有限公司, 江苏无锡 214000;
3. 清华大学环境学院环境模拟与污染控制国家重点联合实验室环境前沿技术北京实验室, 北京 100084

基金项目:

国家自然科学基金项目“准分子光源处理电子纯水有机物”（52270045）；深圳市鹏瑞基金（SZPR2023004）

详细信息

作者简介:
李声美（2001—），女，硕士研究生，主要从事水循环利用研究。lism23@mails.tsinghua.edu.cn

通讯作者:
王文龙（1990—），男，副教授，主要从事水污染控制和循环利用研究。wwl20@sz.tsinghua.edu.cn

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出版历程
- 收稿日期: 2024-04-03
- 网络出版日期: 2026-02-26
- 刊出日期: 2026-01-22

Interpretation of the group standard： Guidelines for Water Reuse-Electronic Grade Ultrapure Water Source

1. Shenzhen Key Laboratory of Ecological Restoration and Carbon Sequestration, Environmental Protection Key Laboratory of Microbial Application and Risk Control, Institute of Environment and Ecology, Tsinghua Shenzhen International Graduate School, Shenzhen 518055, China;
2. China Electronics Innovation Environmental Technology Co., Ltd., Wuxi 214000, China;
3. State Key Joint Laboratory of Environmental Simulation and Pollution Control, Beijing Laboratory for Environmental Frontier Technologies, School of Environment, Tsinghua University, Beijing 100084, China

摘要

摘要: 随着我国电子芯片等半导体制造业的自主化快速发展，电子级水的水量需求越来越大。然而，我国当前面临突出的水资源短缺问题，难以满足电子级水制备需求。再生水用于电子级水制备是解决这一矛盾的重要方法，是国际先进企业的重要发展方向，在国内的实践逐渐增多。但电子级水的水质要求极高，再生水作为水源的水质标准在国内外尚属空白，实际应用中面临水质指标不全、限值设置不清等问题，难以规范指导电子制造业的再生水利用。T/CSES 122—2023《再生水利用电子级水水源水质》团体标准，以建立用于电子级水水源的再生水分类及水质要求为目标，确定了再生水水质指标及限值、处理要求及管理方法等。该标准的制定和实施，对规范和指导再生水用于电子级水制备具有重要意义，可为推动污废水再生和工业利用提供标准和技术支持。
- 再生水 /
- 电子级水 /
- 标准 /
- 半导体 /
- 水质 /
- 有机碳
Abstract: With the rapid development of China's semiconductor manufacturing industry， including electronic chips， rapidly grows towards self-sufficiency， the demand for ultrapure water in electronic-grade applications is increasing significantly. However， China faces severe water scarcity issues， making it increasingly challenging to meet the demand for ultrapure water production. The utilization of reclaimed water in the preparation of electronic-grade ultrapure water has emerged as an important solution， which is also a significant development direction for advanced international enterprises and being increasingly practiced in China. However， the water quality requirements for electronic-grade ultrapure water are extremely stringent. Currently， there is a lack of water quality standards for reclaimed water used as this water source. This poses challenges such as incomplete water quality indicators， undefined limits， and difficulties in providing standardized guidance for the utilization of reclaimed water in the electronics manufacturing industry. The Guidelines for Water Reuse-Electronic Grade Ultrapure Water Source（T/CSES 122—2023） aims to establish a classification system for such reclaimed water and to define its corresponding water quality indicators， limit values， treatment requirements， and management methods. Its formulation and implementation are of significant importance for standardizing and guiding the utilization of reclaimed water in producing electronic-grade ultrapure water. Moreover， it provides essential standards and technical support for promoting the resuse of wastewater in industry field.
- reclaimed water /
- electronic-grade ultrapure water /
- standard /
- semiconductor /
- water quality /
- organic carbon

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