Interpretation of the group standard： <i>Guidelines for Water Reuse-Electronic Grade Ultrapure Water Source</i>

LI Shengmei; WANG Wenlong; WU Qianyuan; XIONG Jianglei; TIAN Yuming; WU Yinhu; CHEN Zhuo; CAI Hanying; HU Hongying

doi:10.13205/j.hjgc.202601001

Volume 44 Issue 1

Jan. 2026

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Article Navigation > ENVIRONMENTAL ENGINEERING > 2026 > 44(1): 1-7

LI Shengmei, WANG Wenlong, WU Qianyuan, XIONG Jianglei, TIAN Yuming, WU Yinhu, CHEN Zhuo, CAI Hanying, HU Hongying. Interpretation of the group standard： Guidelines for Water Reuse-Electronic Grade Ultrapure Water Source[J]. ENVIRONMENTAL ENGINEERING , 2026, 44(1): 1-7. doi: 10.13205/j.hjgc.202601001

Citation:

LI Shengmei, WANG Wenlong, WU Qianyuan, XIONG Jianglei, TIAN Yuming, WU Yinhu, CHEN Zhuo, CAI Hanying, HU Hongying. Interpretation of the group standard： Guidelines for Water Reuse-Electronic Grade Ultrapure Water Source[J]. ENVIRONMENTAL ENGINEERING , 2026, 44(1): 1-7. doi: 10.13205/j.hjgc.202601001

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Interpretation of the group standard： Guidelines for Water Reuse-Electronic Grade Ultrapure Water Source

doi: 10.13205/j.hjgc.202601001

1. Shenzhen Key Laboratory of Ecological Restoration and Carbon Sequestration, Environmental Protection Key Laboratory of Microbial Application and Risk Control, Institute of Environment and Ecology, Tsinghua Shenzhen International Graduate School, Shenzhen 518055, China;
2. China Electronics Innovation Environmental Technology Co., Ltd., Wuxi 214000, China;
3. State Key Joint Laboratory of Environmental Simulation and Pollution Control, Beijing Laboratory for Environmental Frontier Technologies, School of Environment, Tsinghua University, Beijing 100084, China

Received Date: 2024-04-03
Available Online: 2026-02-26
Publish Date: 2026-01-22

Abstract

Abstract

With the rapid development of China's semiconductor manufacturing industry， including electronic chips， rapidly grows towards self-sufficiency， the demand for ultrapure water in electronic-grade applications is increasing significantly. However， China faces severe water scarcity issues， making it increasingly challenging to meet the demand for ultrapure water production. The utilization of reclaimed water in the preparation of electronic-grade ultrapure water has emerged as an important solution， which is also a significant development direction for advanced international enterprises and being increasingly practiced in China. However， the water quality requirements for electronic-grade ultrapure water are extremely stringent. Currently， there is a lack of water quality standards for reclaimed water used as this water source. This poses challenges such as incomplete water quality indicators， undefined limits， and difficulties in providing standardized guidance for the utilization of reclaimed water in the electronics manufacturing industry. The Guidelines for Water Reuse-Electronic Grade Ultrapure Water Source（T/CSES 122—2023） aims to establish a classification system for such reclaimed water and to define its corresponding water quality indicators， limit values， treatment requirements， and management methods. Its formulation and implementation are of significant importance for standardizing and guiding the utilization of reclaimed water in producing electronic-grade ultrapure water. Moreover， it provides essential standards and technical support for promoting the resuse of wastewater in industry field.
- reclaimed water,
- electronic-grade ultrapure water,
- standard,
- semiconductor,
- water quality,
- organic carbon

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References(31)

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